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Ultra-Low Pressure Digital Sensor


The SM9541 series is a digital, low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option.


  • Fully digital, pressure calibrated and temperature compensated output
  • l2C digital interface
  • Compensated temperature range: -5 to 650C
  • Compound gage and differential pressure configuration
  • Insensitive to mounting orientation
  • Robust JEDEC SOIC-16 package for automated assembly
  • Manufactured according to ISO9001 and ISO/TS 16949 standards
  • RoHS & REACH compliant
  • Pressure ranges from 10cm*H2O to 140 cm*H2O (0.14 to 2 PSI)